Description:

●加热源:4 Inch 5 Zones Max.1200℃高温炉

●基板:2-3 Inch或其他尺寸

●Ga Boat, NH₃, HCL Shower Head, Gas Lines Design

●Gas:HCL，N₂，H₂, NH₃ ... etc.,

●PC + PLC Control

HVPE 氢化物磊晶系统